화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 CoInGaAs as a novel self-aligned metallic source/drain material for implant-less In0.53Ga0.47As n-MOSFETs
Ivana, Kong EYJ, Subramanian S, Zhou Q, Pan JS, Yeo YC
Solid-State Electronics, 78, 62, 2012
2 Ambient temperature characteristics of Schottky contacts on 4H-SiC aged in air at 350 degrees C
Adedeji AV, Ahyi AC, Williams JR, Mohney SE, Scofield JD
Solid-State Electronics, 54(7), 736, 2010
3 Addressing materials and integration issues for NiSi silicide contact metallization in nano-scale CMOS devices
Chi DZ, Lee RTP, Wong ASW
Thin Solid Films, 515(22), 8102, 2007
4 Ohmic contact to p-type GaN using a novel Ni/Cu scheme
Liu SH, Hwang JM, Hwang ZH, Hung WH, Hwang HL
Applied Surface Science, 212, 907, 2003
5 Effect of in situ plasma oxidation of TiN diffusion barrier for AlSiCu/TiN/Ti metallization structure of integrated circuits
Fortin V, Gujrathi SC, Gagnon G, Gauvin R, Currie JF, Ouellet L, Tremblay Y
Journal of Vacuum Science & Technology B, 17(2), 423, 1999