검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Electron-beam double resist process to enhance bright field pattern resolution Chan VWC, Chan PCH Journal of Vacuum Science & Technology B, 20(3), 849, 2002 |
| 2 |
Resist hardening by fluorocarbon plasma for electron-beam and optical mix-and-match lithography Chan VWC, Hai CH, Chan PCH Journal of Vacuum Science & Technology B, 19(3), 743, 2001 |