검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Selective Si and SiGe Epitaxial Heterostructures Grown Using an Industrial Low-Pressure Chemical-Vapor-Deposition Module Bodnar S, Deberranger E, Bouillon P, Mouis M, Skotnicki T, Regolini JL Journal of Vacuum Science & Technology B, 15(3), 712, 1997 |
| 2 |
Integration of SiGe Heterojunction Bipolar-Transistors in a 200 mm Industrial BiCMOS Technology Deberranger E, Bodnar S, Chantre A, Kirtsch J, Monroy A, Granier A, Laurens M, Regolini JL, Mouis M Thin Solid Films, 294(1-2), 250, 1997 |