검색결과 : 2건
No. | Article |
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1 |
Characterization of High Oxygen - Tetraethylorthosilicate Ratio Plasma-Enhanced Chemical-Vapor-Deposited Films Decrosta DA, Hackenberg JJ, Linn JH Journal of the Electrochemical Society, 143(3), 1079, 1996 |
2 |
Charge Issues in High Oxygen Gas Ratio Tetraethylorthosilicate Plasma-Enhanced Chemical-Vapor-Deposition Films Decrosta DA, Hackenberg JJ Journal of Vacuum Science & Technology A, 14(3), 709, 1996 |