검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of TaN and Ta3N5 using pentakis(dimethylamino) tantalum and either ammonia or monomethylhydrazine Fang ZW, Aspinall HC, Odedra R, Potter RJ Journal of Crystal Growth, 331(1), 33, 2011 |
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of TaN and Ta3N5 using pentakis(dimethylamino) tantalum and either ammonia or monomethylhydrazine Fang ZW, Aspinall HC, Odedra R, Potter RJ Journal of Crystal Growth, 331(1), 33, 2011 |