화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Reactive bipolar pulsed dual magnetron sputtering of ZrN films: The effect of duty cycle
Rizzo A, Valerini D, Capodieci L, Mirenghi L, Di Benedetto F, Protopapa ML
Applied Surface Science, 427, 994, 2018
2 Characteristics of ITO Thin Films for the Plasma Display Panel Prepared by a MF Dual Magnetron Sputtering in the Oxygen Atmosphere
Lee JH, Sohn SH, Moon JH, Park MS, Lee SG
Molecular Crystals and Liquid Crystals, 499, 500, 2009
3 Investigation of Ti/TiN multilayered films in a reactive mid-frequency dual-magnetron sputtering
Xiang Y, Hua M, Cheng-Biao W, Zhi-Qiang F, Yang L
Applied Surface Science, 253(7), 3705, 2007
4 Physical properties of erbium implanted tungsten oxide films deposited by reactive dual magnetron sputtering
Mohamed SH, Anders A
Thin Solid Films, 515(13), 5264, 2007
5 Fabrication and characterization of metal and semiconductor SmS thin films by rf/dc dual magnetron sputtering
Tanemura S, Koide S, Senzaki Y, Miao L, Hirai H, Mori Y, Jin P, Kaneko K, Terai A, Nabatova-Gabain N
Applied Surface Science, 212, 279, 2003