검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Incorporating a corner correction scheme into enhanced pattern area density proximity effect correction Ea CS, Brown AD Journal of Vacuum Science & Technology B, 19(5), 1985, 2001 |
| 2 |
Enhanced pattern area density proximity effect correction Ea CS, Brown AD Journal of Vacuum Science & Technology B, 17(2), 323, 1999 |