검색결과 : 1건
No. | Article |
---|---|
1 |
Dopant dose loss at the Si-SiO2 interface Vuong HH, Rafferty CS, Eshraghi SA, Ning J, McMacken JR, Chaudhry S, McKinley J, Stevie FA Journal of Vacuum Science & Technology B, 18(1), 428, 2000 |
No. | Article |
---|---|
1 |
Dopant dose loss at the Si-SiO2 interface Vuong HH, Rafferty CS, Eshraghi SA, Ning J, McMacken JR, Chaudhry S, McKinley J, Stevie FA Journal of Vacuum Science & Technology B, 18(1), 428, 2000 |