검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Implementation of real-time proximity effect correction in a raster shaped beam tool Boegli V, Johnson L, Kao H, Veneklasen L, Hofmann U, Finkelstein I, Stovall S, Rishton S Journal of Vacuum Science & Technology B, 18(6), 3138, 2000 |