검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Impact of the resist properties on the antisticking layer degradation in UV nanoimprint lithography Francone A, Iojoiu C, Poulain C, Lombard C, Pepin-Donat B, Boussey J, Zelsmann M Journal of Vacuum Science & Technology B, 28(6), C6M72, 2010 |
| 2 |
Double-anchoring fluorinated molecules for antiadhesion mold treatment in UV nanoimprint lithography Zelsmann M, Truffier-Boutry D, Francone A, Alleaume C, Kurt I, Beaurain A, Pelissier B, Pepin-Donat B, Lombard C, Boussey J Journal of Vacuum Science & Technology B, 27(6), 2873, 2009 |