검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Mask-topography-induced phase effects and wave aberrations in optical and extreme ultraviolet lithography Erdmann A, Shao F, Evanschitzky P, Fuhner T Journal of Vacuum Science & Technology B, 28(6), C6J1, 2010 |
| 2 |
Modeling of industrial bulk crystal growth-state of the art and challenges Fischer B, Friedrich J, Jung T, Hainke M, Dagner J, Fuhner T, Schwesig P Journal of Crystal Growth, 275(1-2), 240, 2005 |
| 3 |
Use of genetic algorithms for the development and optimization of crystal growth processes Fuhner T, Jung T Journal of Crystal Growth, 266(1-3), 229, 2004 |