화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 An accurate expression to estimate the metal gate granularity induced threshold voltage variability in NWFETs
Vardhan PH, Ganguly S, Ganguly U
Solid-State Electronics, 152, 65, 2019
2 Analytical modeling of metal gate granularity based threshold voltage variability in NWFET
Vardhan PH, Mittal S, Ganguly S, Ganguly U
Solid-State Electronics, 147, 26, 2018
3 Fabrication of ultraplanar aluminum mirror array by novel encapsulation CMP for microoptics and MEMS applications
Ganguly U, Krusius JP
Journal of the Electrochemical Society, 151(11), H232, 2004
4 Novel compensation chemical metal polishing for low dishing and high global planarity for ultra-planar die applications in micro-optics and micro-electro-mechanical systems
Ganguly U, Krusius JP
Thin Solid Films, 460(1-2), 306, 2004