검색결과 : 9건
| No. | Article |
|---|---|
| 1 |
Formation of dendritic crystal structures in thin silicon films on silicon dioxide by carbon ion implantation and high intensity large area flash lamp irradiation Voelskow M, Endler R, Schumann T, Mucklich A, Ou X, Liepack EH, Gebel T, Peeva A, Skorupa W Journal of Crystal Growth, 388, 70, 2014 |
| 2 |
Comparative study of charge trapping in high-dose Si and Ge-implanted Al/SiO2/Si structures Nazarov A, Skorupa W, Osiyuk IN, Tjagulskii IP, Lysenko VS, Yankov RA, Gebel T Journal of the Electrochemical Society, 152(2), F20, 2005 |
| 3 |
Advanced thermal processing of ultrashallow implanted junctions using flash lamp annealing Skorupa W, Gebel T, Yankov RA, Paul S, Lerch W, Downey DF, Arevalo EA Journal of the Electrochemical Society, 152(6), G436, 2005 |
| 4 |
Bulk-limited conduction of Ge-implanted thermally grown SiO2 layers Zhao J, Rebohle L, Gebel T, von Borany J, Skorupa W Solid-State Electronics, 46(5), 661, 2002 |
| 5 |
Memory properties of Si+ implanted gate oxides: from MOS capacitors to nvSRAM von Borany J, Gebel T, Stegemann KH, Thees HJ, Wittmaack M Solid-State Electronics, 46(11), 1729, 2002 |
| 6 |
Ion beam processing for Si/C-rich thermally grown SiO2 layers: photoluminescence and microstructure Rebohle L, Gebel T, Frob H, Reuther H, Skorupa W Applied Surface Science, 184(1-4), 156, 2001 |
| 7 |
Efficient blue light emission from silicon - The first integrated Si-based optocoupler Rebohle L, von Borany J, Borchert D, Frob H, Gebel T, Helm M, Moller W, Skorupa W Electrochemical and Solid State Letters, 4(7), G57, 2001 |
| 8 |
Flash lamp annealing of implantation doped p- and n-type 6H-SiC Panknin D, Gebel T, Skorupa W Materials Science Forum, 353-356, 587, 2001 |
| 9 |
Application and improvement of the spreading resistance method for p-type 6H-SIC Gebel T, Panknin D, Riehn R, Parascandola S, Skorupa W Materials Science Forum, 338-3, 741, 2000 |