검색결과 : 14건
| No. | Article |
|---|---|
| 1 |
Superhydrophobic polymeric films with hierarchical structures produced by nanoimprint (NIL) and plasma roughening Durret J, Szkutnik PD, Frolet N, Labau S, Gourgon C Applied Surface Science, 445, 97, 2018 |
| 2 |
Formation of Submicrometer Pore Arrays by Electrochemical Etching of Silicon and Nanoimprint Lithography Laffite G, Roumanie M, Gourgon C, Perret C, Boussey J, Kleimann P Journal of the Electrochemical Society, 158(1), D10, 2011 |
| 3 |
NIL processes and material characterization on transparent substrates for optical applications Chaix N, Gourgon C, Perret C, Decossas S, Landis S, Lambertini VG, Pira NL Journal of Vacuum Science & Technology B, 26(6), 2174, 2008 |
| 4 |
Comparison of monomer and polymer resists in thermal nanoimprint lithography Zelsmann M, Toralla K, De Girolamo J, Boutry D, Gourgon C Journal of Vacuum Science & Technology B, 26(6), 2430, 2008 |
| 5 |
Nanoimprint lithography processes on 200 mm Si wafer for optical application: Residual thickness etching anisotropy Chaix N, Gourgon C, Perret C, Landis S, Leveder T Journal of Vacuum Science & Technology B, 25(6), 2346, 2007 |
| 6 |
Benchmarking of 50 nm features in thermal nanoimprint Gourgon C, Chaix N, Schift H, Tormen M, Landis S, Torres CMS, Kristensen A, Pedersen RH, Christiansen MB, Fernandez-Cuesta I, Mendels D, Montelius L, Haatainen T Journal of Vacuum Science & Technology B, 25(6), 2373, 2007 |
| 7 |
Photopolymerization kinetic study of UV nanoimprint lithography dedicated resists Voisin P, Zelsmann M, Ridaoui H, Chouiki M, Gourgon C, Boussey J, Zahouily K Journal of Vacuum Science & Technology B, 25(6), 2384, 2007 |
| 8 |
Influence of mold depth on capillary bridges in nanoimprint lithography Chaix N, Landis S, Hermelin D, Leveder T, Perret C, Delaye V, Gourgon C Journal of Vacuum Science & Technology B, 24(6), 3011, 2006 |
| 9 |
Spatial control of organic nanocrystal nucleation in sol-gel thin films for 3-D optical data storage devices or chemical multi-sensors Botzung-Appert E, Zaccaro J, Gourgon C, Usson Y, Baldeck PL, Ibanez A Journal of Crystal Growth, 283(3-4), 444, 2005 |
| 10 |
Measurement of residual thickness using scatterometry Fuard D, Perret C, Farys V, Gourgon C, Schiavone P Journal of Vacuum Science & Technology B, 23(6), 3069, 2005 |