검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Characterization of High Oxygen - Tetraethylorthosilicate Ratio Plasma-Enhanced Chemical-Vapor-Deposited Films Decrosta DA, Hackenberg JJ, Linn JH Journal of the Electrochemical Society, 143(3), 1079, 1996 |
| 2 |
Charge Issues in High Oxygen Gas Ratio Tetraethylorthosilicate Plasma-Enhanced Chemical-Vapor-Deposition Films Decrosta DA, Hackenberg JJ Journal of Vacuum Science & Technology A, 14(3), 709, 1996 |
| 3 |
Identification of Plasma-Induced Failure Modes in the Development of a Bipolar-Complementary Metal-Oxide-Semiconductor Process Hackenberg JJ, Dion MJ, Hemmenway DF, Pearce LG, Werner JW Journal of Vacuum Science & Technology A, 13(3), 943, 1995 |