검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Thin-film resistor fabrication for InP technology applications Kopf RF, Melendes R, Jacobson DC, Tate A, Melendes MA, Reyes RR, Hamm RA, Yang Y, Frackoviak J, Weimann NG, Maynard HL, Liu CT Journal of Vacuum Science & Technology B, 20(3), 871, 2002 |
| 2 |
Alignment with exposed resist in photolithography Burm J, Tate A, Kopf RF, Ryan RW, Hamm RA, Chirovsky LM Journal of Vacuum Science & Technology B, 17(3), 905, 1999 |
| 3 |
Side-by-side wafer bonding of InP for use with stepper-based lithography Ryan RW, Kopf RF, Tate A, Burm J, Hamm RA Journal of Vacuum Science & Technology B, 16(4), 2110, 1998 |
| 4 |
Dielectric-assisted trilayer lift-off process for improved metal definition Ryan RW, Kopf RF, Hamm RA, Malik RJ, Masaitis R, Opila R Journal of Vacuum Science & Technology B, 16(5), 2759, 1998 |
| 5 |
Compact Metalorganic Molecular-Beam Epitaxy Growth System Hamm RA, Ritter D, Temkin H Journal of Vacuum Science & Technology A, 12(5), 2790, 1994 |