검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Iridium precursor pyrolysis and oxidation reactions and direct liquid injection chemical vapor deposition of iridium films Endle JP, Sun YM, Nguyen N, Madhukar S, Hance RL, White JM, Ekerdt JG Thin Solid Films, 388(1-2), 126, 2001 |
| 2 |
Precursor chemistry and film growth with (methylcyclopentadienyl) (1,5-cyclooctadiene)iridium Sun YM, Yan XM, Mettlach N, Endle JP, Kirsch PD, Ekerdt JG, Madhukar S, Hance RL, White JM Journal of Vacuum Science & Technology A, 18(1), 10, 2000 |
| 3 |
Evaluation of precursors for chemical vapor deposition of ruthenium Smith KC, Sun YM, Mettlach NR, Hance RL, White JM Thin Solid Films, 376(1-2), 73, 2000 |
| 4 |
Iridium film growth with iridium tris-acetylacetonate: oxygen and substrate effects Sun YM, Endle JP, Smith K, Whaley S, Mahaffy R, Ekerdt JG, White JM, Hance RL Thin Solid Films, 346(1-2), 100, 1999 |