화학공학소재연구정보센터
검색결과 : 10건
No. Article
1 Thickness-dependent surface morphology and crystallization of HfO2 coatings prepared with ion-assisted deposition
Zhang L, Zhang JL, Jiao HF, Bao GH, Wang ZS, Cheng XB
Thin Solid Films, 642, 359, 2017
2 High performance and the low voltage operating InGaZnO thin film transistor
Son DH, Kim DH, Sung SJ, Jung EA, Kang JK
Current Applied Physics, 10(4), E157, 2010
3 Electrical characterisation of HfYO MIM-structures deposited by ALD
Roessler T, Gluch J, Albert M, Bartha JW
Thin Solid Films, 518(16), 4680, 2010
4 Thickness dependence of high-k materials on the characteristics of MAHONOS structured charge trap flash memory
You HW, Oh SM, Cho WJ
Thin Solid Films, 518(22), 6460, 2010
5 Physical and electrical characteristics of hafnium oxide films on AlGaN/GaN heterostructure grown by pulsed laser deposition
Tian F, Chor EF
Thin Solid Films, 518(24), E121, 2010
6 Interface roughness effect between gate oxide and metal gate on dielectric property
Son JY, Maeng WJ, Kim WH, Shin YH, Kim H
Thin Solid Films, 517(14), 3892, 2009
7 Overview about the optical properties and mechanical stress of different dielectric thin films produced by reactive-low-voltage-ion-plating
Hallbauer A, Huber D, Strauss GN, Schlichtherle S, Kunz A, Pulker HK
Thin Solid Films, 516(14), 4587, 2008
8 Dependences of effective work functions of TaN on HfO(2) and SiO(2) on post-metallization anneal
Sugimoto Y, Kajiwara M, Yamamoto K, Suehiro Y, Wang D, Nakashima H
Thin Solid Films, 517(1), 204, 2008
9 Reliability degradation of thin HfO(2)/SiO(2) gate stacks by remote RF hydrogen and deuterium plasma treatment
Efthymiou E, Bernardini S, Zhang JF, Volkos SN, Hamilton B, Peaker AR
Thin Solid Films, 517(1), 207, 2008
10 Engineering of interfacial layer between HfAl(2)O(5) dielectric film and Si with a Ti-capping layer
Cheng XH, Song ZR, Xing YM, Yu YH, Shen DS
Thin Solid Films, 517(1), 462, 2008