검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Self assembled micro masking effect in the fabrication of SiC nanopillars by ICP-RIE dry etching Kathalingam A, Kim MR, Chae YS, Sudhakar S, Mahalingam T, Rhee JK Applied Surface Science, 257(9), 3850, 2011 |
| 2 |
자성 메모리의 적용을 위한 나노미터 크기로 패턴된 Magnetic Tunnel Junction의 식각 특성 박익현, 이장우, 정지원 Journal of the Korean Industrial and Engineering Chemistry, 16(6), 853, 2005 |
| 3 |
Inductively-coupled-plasma reactive ion etching of ZnO using BCl3-based plasmas and effect of the plasma treatment on Ti/Au ohmic contacts to ZnO Kim HK, Bae JW, Kim KK, Park SJ, Seong TY, Adesida I Thin Solid Films, 447, 90, 2004 |
| 4 |
Dry etching and metallization schemes in a GaN/SiC heterojunction device process Danielsson E, Zetterling CM, Ostling M, Lee SK, Linthicum KJ, Thomson DB, Nam OH, Davis RF Materials Science Forum, 338-3, 1049, 2000 |