검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Low Temperature Germanium Growth on Silicon Oxide Using Boron Seed Layer and In Situ Dopant Activation Tada M, Park JH, Kuzum D, Thareja G, Jain JR, Nishi Y, Saraswat KC Journal of the Electrochemical Society, 157(3), H371, 2010 |
| 2 |
Low-Temperature, Low-Pressure Chemical Vapor Deposition and Solid Phase Crystallization of Silicon-Germanium Films Tada M, Park JH, Jain JR, Saraswat KC Journal of the Electrochemical Society, 156(1), D23, 2009 |