검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Deposition Uniformity, Particle Nucleation, and the Optimum Conditions for Chemical-Vapor-Deposition in Multiwafer Furnaces Griffiths SK, Nilson RH Journal of the Electrochemical Society, 144(4), 1399, 1997 |
| 2 |
Low-Pressure Chemical-Vapor-Deposition of Polycrystalline Silicon - Analysis of Nonuniform Growth in an Industrial-Scale Reactor Weerts WL, Decroon MH, Marin GB Journal of the Electrochemical Society, 144(9), 3213, 1997 |
| 3 |
Chemical-Vapor-Deposition of Silicon Doped in-Situ with Phosphorus .1. Experimental-Study Tounsi A, Scheid E, Duverneuil P, Couderc JF Canadian Journal of Chemical Engineering, 74(6), 941, 1996 |
| 4 |
Low-Pressure Chemical-Vapor-Deposition of Polycrystalline Silicon - Validation and Assessment of Reactor Models Weerts WL, Decroon MH, Marin GB Chemical Engineering Science, 51(10), 2109, 1996 |