검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
High-temperature stability of lanthanum silicate gate dielectric MIS devices with Ta and TaN electrodes Lichtenwalner DJ, Jur JS, Jha R, Inoue N, Chen B, Misra V, Kingon AI Journal of the Electrochemical Society, 153(9), F210, 2006 |
| 2 |
Analysis of the Oxidation-Kinetics and Barrier Layer Properties of Zrn and Pt/Ru Thin-Films for DRAM Applications Alshareef HN, Chen X, Lichtenwalner DJ, Kingon AI Thin Solid Films, 280(1-2), 265, 1996 |
| 3 |
Growth and Characterization of Cubic Boron-Nitride Thin-Films Kester DJ, Ailey KS, Lichtenwalner DJ, Davis RF Journal of Vacuum Science & Technology A, 12(6), 3074, 1994 |