검색결과 : 2건
No. | Article |
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1 |
Application of the low dielectric methyl-silsesquiazane (MSZ) as a passivation layer on TFT-LCD Chang TS, Chang TC, Liu PT, Chiang CY, Chen SC, Yeh FS Thin Solid Films, 515(3), 1117, 2006 |
2 |
Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications Chang TC, Yan ST, Liu R, Lin ZW, Aoki H, Sze SM Thin Solid Films, 447, 516, 2004 |