검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Nanoscale etching of III-V semiconductors in acidic hydrogen peroxide solution: GaAs and InP, a striking contrast in surface chemistry van Dorp DH, Arnauts S, Laitinen M, Sajavaara T, Meersschaut J, Conard T, Kelly JJ Applied Surface Science, 465, 596, 2019 |
| 2 |
Metal barrier induced damage in self-assembly based organosilica low-k dielectrics and its reduction by organic template residues Krishtab M, De Marneffe JF, Armini S, Meersschaut J, Benders H, Wilson C, De Gendt S Applied Surface Science, 485, 170, 2019 |
| 3 |
Thermodynamic modelling of InAs/InP(001) growth towards quantum dots formation by metalorganic vapor phase epitaxy Hasan S, Merckling C, Pantouvaki M, Meersschaut J, Van Campenhout J, Vandervorst W Journal of Crystal Growth, 509, 133, 2019 |
| 4 |
Growth mechanisms for Si epitaxy on O atomic layers: Impact of O-content and surface structure Jayachandran S, Billen A, Douhard B, Conard T, Meersschaut J, Moussa A, Caymax M, Bender H, Vandervorst W, Heyns M, Delabie A Applied Surface Science, 384, 152, 2016 |
| 5 |
Metal-Insulator Transition in ALD VO2 Ultrathin Films and Nanoparticles: Morphological Control Peter AP, Martens K, Rampelberg G, Toeller M, Ablett JM, Meersschaut J, Cuypers D, Franquet A, Detavernier C, Rueff JP, Schaekers M, Van Elshocht S, Jurczak M, Adelmann C, Radu IP Advanced Functional Materials, 25(5), 679, 2015 |
| 6 |
Deposition of O atomic layers on Si(100) substrates for epitaxial Si-O superlattices: investigation of the surface chemistry Jayachandran S, Delabie A, Billen A, Dekkers H, Douhard B, Conard T, Meersschaut J, Caymax M, Vandervorst W, Heyns M Applied Surface Science, 324, 251, 2015 |
| 7 |
Chemical vapor deposition processes for the fabrication of epitaxial Si-O superlattices Jayachandran S, Delabie A, Maggen J, Caymax M, Loo R, Meersschaut J, Lenka H, Vandervorst W, Heyns M Thin Solid Films, 557, 36, 2014 |
| 8 |
Study of Chemical Vapor Deposition of Manganese on Porous SiCOH Low-k Dielectrics Using Bis(ethylcyclopentadienyl)manganese Jourdan N, Krishtab MB, Baklanov MR, Meersschaut J, Wilson CJ, Ablett JM, Fonda E, Zhao L, Van Elshocht S, Tokei Z, Vancoille E Electrochemical and Solid State Letters, 15(5), H176, 2012 |
| 9 |
Lanthanide Aluminates as Dielectrics for Non-Volatile Memory Applications: Material Aspects Adelmann C, Swerts J, Richard O, Conard T, Popovici M, Meersschaut J, Afanas'ev VV, Breuil L, Cacciato A, Opsomer K, Brijs B, Tielens H, Pourtois G, Bender H, Jurczak M, Van Houdt J, Van Elshocht S, Kittl JA Journal of the Electrochemical Society, 158(8), H778, 2011 |
| 10 |
Alternative high-k dielectrics for semiconductor applications Van Elshocht S, Adelmann C, Clima S, Pourtois G, Conard T, Delabie A, Franquet A, Lehnen P, Meersschaut J, Menou N, Popovici M, Richard O, Schram T, Wang XP, Hardy A, Dewulf D, Van Bael MK, Lehnen P, Blomberg T, Pierreux D, Swerts J, Maes JW, Wouters DJ, De Gendt S, Kittl JA Journal of Vacuum Science & Technology B, 27(1), 209, 2009 |