화학공학소재연구정보센터
검색결과 : 18건
No. Article
1 Reactive co-deposition of TiNx/SiNx nanocomposites using pulsed direct current magnetron sputtering
Sunal P, Messier R, Horn MW
Thin Solid Films, 515(4), 2185, 2006
2 Deposition of c-BN on silicon substrates coated with diamond thin films
He Q, Li CM, Frankel C, Pilione L, Drawl B, Lu FX, Messier R
Thin Solid Films, 474(1-2), 96, 2005
3 Selective growth of sculptured nanowires on microlithographic lattices
Horn MW, Pickett MD, Messier R, Lakhtakia A
Journal of Vacuum Science & Technology B, 22(6), 3426, 2004
4 Analysis of the optical properties and structure of sculptured thin films from spectroscopic Mueller matrix ellipsometry
Podraza NJ, Chen C, An I, Ferreira GM, Rovira PI, Messier R, Collins RW
Thin Solid Films, 455-56, 571, 2004
5 Characterization of cubic boron nitride growth busing UV-extended real-time spectroscopic ellipsometry: Effect of plasma additions and dynamic substrate bias steps
Zapien JA, Collins RW, Messier R
Journal of Vacuum Science & Technology A, 20(4), 1395, 2002
6 Recent progress in thin film growth analysis by multichannel spectroscopic ellipsometry
Collins RW, Koh J, Fujiwara H, Rovira PI, Ferlauto AS, Zapien JA, Wronski CR, Messier R
Applied Surface Science, 154, 217, 2000
7 Origin and evolution of sculptured thin films
Messier R, Venugopal VC, Sunal PD
Journal of Vacuum Science & Technology A, 18(4), 1538, 2000
8 Low-permittivity nanocomposite materials using sculptured thin film technology
Venugopal VC, Lakhtakia A, Messier R, Kucera JP
Journal of Vacuum Science & Technology B, 18(1), 32, 2000
9 Real-time spectroscopic ellipsometry from 1.5 to 6.5 eV
Zapien JA, Collins RW, Messier R
Thin Solid Films, 364(1-2), 16, 2000
10 Control of the preferred orientation of AlN thin films by collimated sputtering
Rodriguez-Navarro A, Otano-Rivera W, Pilione LJ, Messier R, Garcia-Ruiz JM
Journal of Vacuum Science & Technology A, 16(3), 1244, 1998