검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Evaluation of precursors for chemical vapor deposition of ruthenium Smith KC, Sun YM, Mettlach NR, Hance RL, White JM Thin Solid Films, 376(1-2), 73, 2000 |
| No. | Article |
|---|---|
| 1 |
Evaluation of precursors for chemical vapor deposition of ruthenium Smith KC, Sun YM, Mettlach NR, Hance RL, White JM Thin Solid Films, 376(1-2), 73, 2000 |