화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 High growth rates (> 30 mu m/h) of 4H-SiC epitaxial layers using a horizontal hot-wall CVD reactor
Myers RL, Shishkin Y, Kordina O, Saddow SE
Journal of Crystal Growth, 285(4), 486, 2005
2 Hydrogen gas sensors using 3C-SiC/Si epitaxial layers
Fawcett TJ, Wolan JT, Myers RL, Walker J, Saddow SE
Materials Science Forum, 457-460, 1499, 2004
3 Development of 3C-SiC SOI structures using Si on polycrystalline SiC wafer bonded substrates
Myers RL, Saddow SE, Rao S, Hobart KD, Fatemi M, Kub FJ
Materials Science Forum, 457-460, 1511, 2004