검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Role of Ions in Electron-Cyclotron-Resonance Plasma-Enhanced Chemical-Vapor-Deposition of Silicon Dioxide Seaward KL, Turner JE, Nauka K, Nel AM Journal of Vacuum Science & Technology B, 13(1), 118, 1995 |
| No. | Article |
|---|---|
| 1 |
Role of Ions in Electron-Cyclotron-Resonance Plasma-Enhanced Chemical-Vapor-Deposition of Silicon Dioxide Seaward KL, Turner JE, Nauka K, Nel AM Journal of Vacuum Science & Technology B, 13(1), 118, 1995 |