검색결과 : 3건
No. | Article |
---|---|
1 |
Large area SiC epitaxial layer growth in a warm-wall planetary VPE reactor Burk AA, O'Loughlin MJ, Paisley MJ, Powell AR, Brady MF, Leonard RT, Muller S, Allen ST Materials Science Forum, 483, 137, 2005 |
2 |
Development of epitaxial SiC processes suitable for bipolar power devices Sumakeris JJ, Das MK, Ha S, Hurt E, Irvine K, Paisley MJ, O'Loughlin MJ, Palmour JW, Skowronski M, Hobgood HM, Carter CH Materials Science Forum, 483, 155, 2005 |
3 |
Multi-wafer VPE growth and characterization of SiC epitaxial layers Nordby HD, O'Loughlin MJ, MacMillan MF, Burk AA, Oliver JD Materials Science Forum, 338-3, 173, 2000 |