검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Formation of SixNy(H) and C:N:H layers by Plasma-Assisted Chemical Vapor Deposition method Jonas S, Janus M, Jaglarz J, Kyziol K Thin Solid Films, 600, 162, 2016 |
| No. | Article |
|---|---|
| 1 |
Formation of SixNy(H) and C:N:H layers by Plasma-Assisted Chemical Vapor Deposition method Jonas S, Janus M, Jaglarz J, Kyziol K Thin Solid Films, 600, 162, 2016 |