검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Adapted tube cleaning practices to reduce particulate contamination at hydrogen fueling stations Terlip D, Hartmann K, Martin J, Rivkin C International Journal of Hydrogen Energy, 44(17), 8692, 2019 |
| 2 |
Investigation of particulate contamination of heated wafers contained in a closed environment Lee M, Yook SJ Journal of Aerosol Science, 88, 148, 2015 |
| 3 |
In-situ analysis of particle contamination in magnetron sputtering processes Selwyn GS, Weiss CA, Sequeda F, Huang C Thin Solid Films, 317(1-2), 85, 1998 |
| 4 |
Particle Contamination Characterization in a Helicon Plasma-Etching Tool Selwyn GS, Bailey AD Journal of Vacuum Science & Technology A, 14(2), 649, 1996 |
| 5 |
The Chemistry of a Ccl2F2 Radio-Frequency Discharge Stoffels WW, Stoffels E, Haverlag M, Kroesen GM, Dehoog FJ Journal of Vacuum Science & Technology A, 13(4), 2058, 1995 |
| 6 |
Fluid Simulations of Particle Contamination in Postplasma Processes Garrity MP, Peterson TW, Garrett LM, Ohanlon JF Journal of Vacuum Science & Technology A, 13(6), 2939, 1995 |
| 7 |
Observations of Particle Layers Levitated in a Radiofrequency Sputtering Plasma Praburam G, Goree J Journal of Vacuum Science & Technology A, 12(6), 3137, 1994 |