검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Experimental study of spatial nonuniformities in 100 MHz capacitively coupled plasma using optical probe Volynets VN, Ushakov AG, Sung D, Tolmachev YN, Pashkovsky VG, Lee JB, Kwon TY, Jeong KS Journal of Vacuum Science & Technology A, 26(3), 406, 2008 |