검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Aging of Photochemical Vapor-Deposited Silicon-Oxide Thin-Films Parada EG, Gonzalez P, Pou J, Serra J, Fernandez D, Leon B, Perezamor M Journal of Vacuum Science & Technology A, 14(2), 436, 1996 |
| 2 |
Evaluation of High-Temperature Sulfidation Protection Provided by Amorphous Si/SiO2 Coatings Produced by ArF Excimer-Laser Chemical-Vapor-Deposition Pou J, Gonzalez P, Fernandez D, Garcia E, Leon B, Perezamor M, Spencer SJ, Saunders SR Journal of Materials Science Letters, 13(8), 551, 1994 |
| 3 |
CO2-Laser Chemical-Vapor-Deposition of Silica Films in a Parallel Configuration - A Study of Gas-Phase Phenomena Fernandez D, Gonzalez P, Pou J, Garcia E, Serra J, Leon B, Perezamor M, Garrido C Journal of Vacuum Science & Technology A, 12(2), 484, 1994 |
| 4 |
Tailoring Silicon-Oxide Film Properties by Tuning the Laser Beam-to-Substrate Distance in ArF Laser-Induced Chemical-Vapor-Deposition Szorenyi T, Gonzalez P, Garcia E, Pou J, Fernandez D, Serra J, Leon B, Perezamor M Thin Solid Films, 241(1-2), 80, 1994 |
| 5 |
Silicon-Oxide Thin-Films Grown by Xe2-Asterisk Excimer Lamp Chemical-Vapor-Deposition - The Role of the Substrate-Temperature and the Window Substrate Distance Gonzalez P, Garcia E, Pou J, Fernandez D, Serra J, Leon B, Perezamor M Thin Solid Films, 241(1-2), 348, 1994 |