검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Mitigation of residual film stress deformation in multilayer microelectromechanical systems cantilever devices Pulskamp JS, Wickenden A, Polcawich R, Piekarski B, Dubey M, Smith G Journal of Vacuum Science & Technology B, 21(6), 2482, 2003 |