검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Study of resolution limits due to intrinsic bias in chemically amplified photoresists Postnikov SV, Stewart MD, Tran HV, Nierode MA, Medeiros DR, Cao T, Byers J, Webber SE, Wilson CG Journal of Vacuum Science & Technology B, 17(6), 3335, 1999 |