검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
PZT-Based Piezoelectric MEMS Technology Smith GL, Pulskamp JS, Sanchez LM, Potrepka DM, Proie RM, Ivanov TG, Rudy RQ, Nothwang WD, Bedair SS, Meyer CD, Polcawich RG Journal of the American Ceramic Society, 95(6), 1777, 2012 |
| 2 |
Deformation behavior of nanograined platinum films Romasco AL, Friedman LH, Fang L, Meirom RA, Clark TE, Polcawich RG, Pulskamp JS, Dubey M, Muhlstein CL Thin Solid Films, 518(14), 3866, 2010 |
| 3 |
Mitigation of residual film stress deformation in multilayer microelectromechanical systems cantilever devices Pulskamp JS, Wickenden A, Polcawich R, Piekarski B, Dubey M, Smith G Journal of Vacuum Science & Technology B, 21(6), 2482, 2003 |