검색결과 : 3건
No. | Article |
---|---|
1 |
Polycrystalline silicon film growth in a SiF4/SiH4/H-2 plasma Lee B, Quinn LJ, Baine PT, Mitchell SJN, Armstrong BM, Gamble HS Thin Solid Films, 337(1-2), 55, 1999 |
2 |
Deposition and Characterization of Silicon Grown in a Sif4/SiH4/H-2 Mixture for TFT Applications Quinn LJ, Lee B, Baine PT, Mitchell SJ, Armstrong BM, Gamble HS Thin Solid Films, 296(1-2), 7, 1997 |
3 |
Single-Crystal Silicon on Glass Baine PT, Quinn LJ, Lee B, Mitchell SJ, Armstrong BM, Gamble HS Thin Solid Films, 296(1-2), 141, 1997 |