화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Polycrystalline silicon film growth in a SiF4/SiH4/H-2 plasma
Lee B, Quinn LJ, Baine PT, Mitchell SJN, Armstrong BM, Gamble HS
Thin Solid Films, 337(1-2), 55, 1999
2 Deposition and Characterization of Silicon Grown in a Sif4/SiH4/H-2 Mixture for TFT Applications
Quinn LJ, Lee B, Baine PT, Mitchell SJ, Armstrong BM, Gamble HS
Thin Solid Films, 296(1-2), 7, 1997
3 Single-Crystal Silicon on Glass
Baine PT, Quinn LJ, Lee B, Mitchell SJ, Armstrong BM, Gamble HS
Thin Solid Films, 296(1-2), 141, 1997