검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Effect of oxygen to argon flow ratio on the properties of Al-doped ZnO films for amorphous silicon thin film solar cell applications Lin YS, Lien SY, Huang YC, Wang CC, Liu CY, Nautiyal A, Wuu DS, Lee SJ Thin Solid Films, 529, 50, 2013 |
| 2 |
Heating of polymer substrate by discharge plasma in radiofrequency magnetron sputtering deposition Sirghi L, Popa G, Hatanaka Y Thin Solid Films, 515(4), 1334, 2006 |
| 3 |
Effect of small nitrogen dilution on the microstructure of hydrogenated silicon thin films deposited by magnetron radiofrequency sputtering Charvet S, Zeinert A, Goncalves C, Goes M Thin Solid Films, 458(1-2), 86, 2004 |