검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of lanthanum oxide with heteroleptic cyclopentadienyl-amidinate lanthanum precursor - Effect of the oxygen source on the film growth and properties Seppala S, Niinisto J, Mattinen M, Mizohata K, Raisanen J, Noh W, Ritala M, Leskela M Thin Solid Films, 660, 199, 2018 |
| 2 |
Studies on Li3AlF6 thin film deposition utilizing conversion reactions of thin films Mantymaki M, Mizohata K, Heikkila MJ, Raisanen J, Ritala M, Leskela M Thin Solid Films, 636, 26, 2017 |
| 3 |
Nucleation and Conformality of Iridium and Iridium Oxide Thin Films Grown by Atomic Layer Deposition Mattinen M, Hamalainen J, Gao F, Jalkanen P, Mizohata K, Raisanen J, Puurunen RL, Ritala M, Leskela M Langmuir, 32(41), 10559, 2016 |
| 4 |
Diffusion of cobalt in ion-implanted ZnO Koskelo O, Raisanen J, Tuomisto F, Eversheim D, Grasza K, Mycielski A Thin Solid Films, 518(14), 3894, 2010 |
| 5 |
Effect of the substrate temperature on the deposition of hydrogenated amorphous carbon by PACVD at 35 kHz Gago R, Sanchez-Garrido O, Climent-Font A, Albella JM, Roman E, Raisanen J, Rauhala E Thin Solid Films, 338(1-2), 88, 1999 |