검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Electrical properties of SiO2 films with embedded nanoparticles formed by SiH4/O-2 chemical vapor deposition Rassel RM, Kim T, Shen Z, Campbell SA, McMurry PH Journal of Vacuum Science & Technology B, 21(6), 2441, 2003 |
| 2 |
Particle formation during low-pressure chemical vapor deposition from silane and oxygen: Measurement, modeling, and film properties Kim T, Suh SM, Girshick SL, Zachariah MR, McMurry PH, Rassel RM, Shen Z, Campbell SA Journal of Vacuum Science & Technology A, 20(2), 413, 2002 |