검색결과 : 3건
No. | Article |
---|---|
1 |
Carbon film deposition from high velocity rarefied flow Rebrov AK, Emelyanov AA, Yudin IB Thin Solid Films, 575, 113, 2015 |
2 |
Activated gas jet deposition Rebrov AK, Maltsev RV, Safonov AI, Timoshenko NI Thin Solid Films, 519(14), 4542, 2011 |
3 |
Free jets in vacuum technologies Rebrov AK Journal of Vacuum Science & Technology A, 19(4), 1679, 2001 |