검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
SiGe/Si heterostructures produced by double-energy Si+ and Ge+, and Ge+ and Ge2+ ion implantations Xia Z, Ristolainen EO, Holloway PH Journal of Vacuum Science & Technology B, 16(5), 2629, 1998 |
| No. | Article |
|---|---|
| 1 |
SiGe/Si heterostructures produced by double-energy Si+ and Ge+, and Ge+ and Ge2+ ion implantations Xia Z, Ristolainen EO, Holloway PH Journal of Vacuum Science & Technology B, 16(5), 2629, 1998 |