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| No. | Article |
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| 1 |
Electron-Beam Lithography for Advanced Device Prototyping - Process Tool Metrology Rosenfield MG, Thomson MG, Coane PJ, Kwietniak KT, Keller J, Klaus DP, Volant RP, Blair CR, Tremaine KS, Newman TH, Hohn FJ Journal of Vacuum Science & Technology B, 11(6), 2615, 1993 |