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Role of chamber pressure on crystallinity and composition of silicon films using silane and methane as precursors in hot-wire chemical vapour deposition technique Madaka R, Kumari J, Kanneboina V, Jha HS, Agarwal P Thin Solid Films, 682, 126, 2019 |
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Chemical state analysis of heavily phosphorus-doped epitaxial silicon films grown on Si (100) by X-ray photoelectron spectroscopy Lee M, Kim S, Ko DH Applied Surface Science, 443, 131, 2018 |
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Electron-ion coupling and ambipolar diffusion in dense electron-hole plasma in thin amorphous Si films studied by single-shot, pulse-width dependent ultrafast laser ablation Danilov P, Ionin A, Khmelnitskii R, Kiseleva I, Kudryashov S, Mel'nik N, Rudenko A, Smirnov N, Zayarny D Applied Surface Science, 425, 170, 2017 |
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Properties of a-C:H:Si thin films deposited by middle-frequency magnetron sputtering Jiang JL, Wang YB, Du JF, Yang H, Hao JY Applied Surface Science, 379, 516, 2016 |
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Metal silicide-templated growth of quality Si films for Schottky-diodes Kim J, Yi J, Anderson WA Thin Solid Films, 518(22), 6510, 2010 |
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Optical properties of evaporated poly-Si thin-films on glass He S, Sproul AB Thin Solid Films, 519(1), 351, 2010 |
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Crystal quality improvement of solid-phase crystallized evaporated silicon films by in-situ densification anneal He S, Hoex B, Inns D, Brazil IC, Widenborg PI, Aberle AG Solar Energy Materials and Solar Cells, 93(6-7), 1116, 2009 |
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Recent contributions of the Kaiserslautern research group to thin silicon solar cell R&D applying the HW(Cat)CVD Schroeder B, Kupich M, Kumar P, Grunsky D Thin Solid Films, 516(5), 722, 2008 |
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Mechanical properties of amorphous and microcrystalline silicon films Kulikovsky V, Vorlicek V, Bohac P, Stranyanek M, Ctvrtlik R, Kurdyumov A Thin Solid Films, 516(16), 5368, 2008 |
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Deposition and field emission properties of highly crystallized silicon films on aluminum-coated polyethylene napthalate Li JS, Wang JX, Yin M, Gao PQ, He DY, Chen Q, Shirai H Journal of Crystal Growth, 306(1), 1, 2007 |