검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Depth Profiling of B Through Silicide on Silicon Structures, Using Secondary Ion-Mass Spectrometry and Resonant Postionization Mass-Spectrometry Debisschop P, Gomez J, Geenen L, Vandervorst W Journal of Vacuum Science & Technology B, 14(1), 311, 1996 |
| 2 |
Analytical Performance of a Secondary-Neutral Microprobe with Electron-Gas Positionization and Magnetic-Sector Mass-Spectrometer Bieck W, Gnaser H, Oechsner H Journal of Vacuum Science & Technology A, 12(4), 2537, 1994 |
| 3 |
Materials and Failure Analysis-Methods and Systems Used in the Development and Manufacture of Silicon Integrated-Circuits Diebold AC Journal of Vacuum Science & Technology B, 12(4), 2768, 1994 |