검색결과 : 9건
| No. | Article |
|---|---|
| 1 |
A Universal Scheme for Patterning of Oxides via Thermal Nanoimprint Lithography Dinachali SS, Saifullah MSM, Ganesan R, Thian ES, He CB Advanced Functional Materials, 23(17), 2201, 2013 |
| 2 |
Fabrication of Sub-10 nm Metallic Lines of Low Line-Width Roughness by Hydrogen Reduction of Patterned Metal-Organic Materials Nedelcu M, Saifullah MSM, Hasko DG, Jang A, Anderson D, Huck WTS, Jones GAC, Welland ME, Kang DJ, Steiner U Advanced Functional Materials, 20(14), 2317, 2010 |
| 3 |
Spin-coatable HfO2 resist for optical and electron beam lithographies Saifullah MSM, Khan MZR, Hasko DG, Leong ESP, Neo XL, Goh ETL, Anderson D, Jones GAC, Welland ME Journal of Vacuum Science & Technology B, 28(1), 90, 2010 |
| 4 |
Characterization of a sol-gel based high-k dielectric field effect transistor for cryogenic operation Khan MZR, Hasko DG, Saifullah MSM, Welland ME Journal of Vacuum Science & Technology B, 26(6), 1887, 2008 |
| 5 |
High resolution nanoimprinting with a robust and reusable polymer mold Barbero DR, Saifullah MSM, Hoffmann P, Mathieu HJ, Anderson D, Jones GAC, Welland ME, Steiner U Advanced Functional Materials, 17(14), 2419, 2007 |
| 6 |
Direct 3D patterning of TiO2 using femtosecond laser pulses Passinger S, Saifullah MSM, Reinhardt C, Subramanian KRV, Chichkov BN, Welland ME Advanced Materials, 19(9), 1218, 2007 |
| 7 |
Sub-10-nm high aspect ratio patterning of ZnO in a 500 mu m main field Saifullah MSM, Subramanian KRV, Anderson D, Kang DJ, Huck WTS, Jones GAC, Welland ME Journal of Vacuum Science & Technology B, 24(3), 1215, 2006 |
| 8 |
Sub-10 nm high-aspect-ratio patterning of ZnO using an electron beam Saifullah MSM, Subramanian KRV, Kang DJ, Anderson D, Huck WTS, Jones GAC, Welland ME Advanced Materials, 17(14), 1757, 2005 |
| 9 |
Comparative study of sputtered and spin-coatable aluminum oxide electron beam resists Saifullah MSM, Kurihara K, Humphreys CJ Journal of Vacuum Science & Technology B, 18(6), 2737, 2000 |