검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Metallization of sub-micron trenches and vias with high aspect ratio Siemroth P, Wenzel C, Klimes W, Schultrich B, Schulke T Thin Solid Films, 308-309, 455, 1997 |
| No. | Article |
|---|---|
| 1 |
Metallization of sub-micron trenches and vias with high aspect ratio Siemroth P, Wenzel C, Klimes W, Schultrich B, Schulke T Thin Solid Films, 308-309, 455, 1997 |