검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Proximity X-ray lithography using self-assembled alkylsiloxane films: Resolution and pattern transfer Yang XM, Peters RD, Kim TK, Nealey PF, Brandow SL, Chen MS, Shirey LM, Dressick WJ Langmuir, 17(1), 228, 2001 |
| 2 |
Electron-beam fabrication of nonplanar templates for contact printing Rhee KW, Shirey LM, Isaacson PI, Komegay CF, Dressick WJ, Chen MS, Brandow SL Journal of Vacuum Science & Technology B, 18(6), 3569, 2000 |
| 3 |
Nanolithography in polymethylmethacrylate: An atomic force microscope study Dobisz EA, Brandow SL, Bass R, Shirey LM Journal of Vacuum Science & Technology B, 16(6), 3695, 1998 |
| 4 |
Electron-beam nanolithography, acid diffusion, and chemical kinetics in SAL-601 Dobisz EA, Fedynyshyn TN, Ma D, Shirey LM, Bass R Journal of Vacuum Science & Technology B, 16(6), 3773, 1998 |
| 5 |
Nanolithography by Displacement of Catalytic Metal-Clusters Using an Atomic-Force Microscope Tip Brandow SL, Dressick WJ, Dulcey CS, Koloski TS, Shirey LM, Schmidt J, Calvert JM Journal of Vacuum Science & Technology B, 15(5), 1818, 1997 |
| 6 |
Effects of Etch Chemistry on SF6-Based Tungsten Etching by Electron-Cyclotron-Resonance Reactive Ion Etching Eddy CR, Kosakowski J, Shirey LM, Dobisz EA, Rhee KW, Chu W, Foster KW, Marrian CR, Peckerar MC Journal of Vacuum Science & Technology B, 12(6), 3351, 1994 |
| 7 |
Photoresist Channel-Constrained Deposition of Electroless Metallization on Ligating Self-Assembled Films Calvert JM, Calabrese GS, Bohland JF, Chen MS, Dressick WJ, Dulcey CS, Georger JH, Kosakowski J, Pavelcheck EK, Rhee KW, Shirey LM Journal of Vacuum Science & Technology B, 12(6), 3884, 1994 |