화학공학소재연구정보센터
검색결과 : 8건
No. Article
1 Controlling dislocation positions in silicon germanium (SiGe) buffer layers by local oxidation
Hu Q, Seo I, Zhang ZN, Lee SH, Kim HM, Kim SH, Kim YS, Lee HH, Xie YH, Kim KB, Yoon TS
Thin Solid Films, 518, S217, 2010
2 Studying the impact of carbon on device performance for strained-Si MOSFETs
Lee MH, Chang ST, Peng CY, Hsieh BF, Maikap S, Liao SH
Thin Solid Films, 517(1), 105, 2008
3 Strained-Si nMOSFET formed on very thin SiGe buffer layer fabricated by ion implantation technique
Sawano K, Fukumoto A, Hoshi Y, Nakagawa K, Shiraki Y
Thin Solid Films, 517(1), 353, 2008
4 Control of misfit dislocations in strain-relaxed SiGe buffer layers on SOI substrates
Taoka N, Sakai A, Mochizuki S, Nakatsuka O, Ogawa M, Zaima S
Thin Solid Films, 508(1-2), 147, 2006
5 N-channel MOSFETs fabricated on He-implanted and annealed SiGe buffer layers
Mooney PM, Rim K, Christiansen SH, Chan KK, Chu JO, Cai J, Chen H, Jordan-Sweet JL, Yang YY, Boyd DC
Solid-State Electronics, 49(10), 1669, 2005
6 Relaxation mechanism of low temperature SiGe/Si(001) buffer layers
Vescan L, Wickenhauser S
Solid-State Electronics, 48(8), 1279, 2004
7 Thin SiGe buffer layer growth by in situ low energy hydrogen plasma preparation
Kuchenbecker J, Kibbel H, Muthsam P, Konig U
Thin Solid Films, 389(1-2), 146, 2001
8 Relaxed Si0.7Ge0.3 buffer layers grown on patterned silicon substrates for SiGe n-channel HMOSFETs
Wohl G, Dudek V, Graf M, Kibbel H, Herzog HJ, Klose M
Thin Solid Films, 369(1-2), 175, 2000