검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Synthesis and ellipsometric characterization of insulating low permittivity SiO2 layers by remote-PECVD using radio-frequency glow discharge Dultsev FN, Solowjev AP Thin Solid Films, 419(1-2), 27, 2002 |
| No. | Article |
|---|---|
| 1 |
Synthesis and ellipsometric characterization of insulating low permittivity SiO2 layers by remote-PECVD using radio-frequency glow discharge Dultsev FN, Solowjev AP Thin Solid Films, 419(1-2), 27, 2002 |